Fast simulation of the E–H mode transition in Ar/O2 inductively coupled plasmas

In this work, an analytical hybrid model, which consists of electromagnetic model and a global is developed to investigate the E H mode transition in planer inductively coupled plasma. By employing effect discharge frequency, oxygen content, gas pressure on investigated. The results show that electron density increases rapidly with coil current when shifts mode, becomes smoother occurs at lower driving frequency higher. As content increases, declines, threshold for exhibits rising trend. evolution nonlinear; i.e., it decreases first then minimum value varies frequency. addition, plasma composition also changes during transition; all charged species densities increase current, except O− density, nonlinearly, indicates decreasing electronegativity mode. obtained work are helpful understanding different discharAr/O2ge parameters Ar/O2 inductive discharges.